This content has been downloaded from IOPscience. Please scroll down to see the full text. Download details: IP Address: 140.113.38.11 This content was downloaded on 25/04/2014 at 00:02 Please note that terms and conditions apply. Plasma-made silicon nanograss and related nanostructures View the table of contents for this issue, or go to the journal homepage for more 2011 J. Phys. D: Appl. Phys. 44 174010 (http://iopscience.iop.org/0022-3727/44/17/174010) Home Search Collections Journals About Contact us My IOPscience