Schottky barrier heights, carrier density, and negative electron affinity of hydrogen-terminated diamond K. Tsugawa, 1,2, * H. Noda, 1 K. Hirose, 3 and H. Kawarada 1 1 School of Science and Engineering, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan 2 Nanotube Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan 3 Institute of Space and Astronautical Science (ISAS), Japan Aerospace Exploration Agency (JAXA), 3-1-1 Yoshinodai, Sagamihara, Kanagawa 229-8510, Japan Received 21 May 2009; published 8 January 2010 Chemical trends of Schottky barrier heights of ten kinds of metal contacts on hydrogen-terminated diamond 001surfaces are estimated from the temperature dependence of their current-voltage characteristics. In addition to the measurements, the interface of the metal/hydrogen-terminated diamond is theoretically modeled including the carrier density of the surface conductive layer and the electron-affinity variation from the clean surface of the hydrogen-terminated diamond. Based on the model, a relation among the carrier density, the electron affinity variation, and the barrier heights are derived. The relation explains well experimental results of and other than the present work. DOI: 10.1103/PhysRevB.81.045303 PACS numbers: 73.30.y I. INTRODUCTION Surfaces of diamonds prepared by chemical vapor depo- sition CVDtechnique are terminated by hydrogen. Despite undoping, the hydrogen-terminated surface of diamond ex- hibits p-type surface conduction 1 in a subsurface region of 10 nm in depth. 2,3 The surface conduction disappears by oxidation and consequently the surface becomes insulating. 4,5 Furthermore, Schottky and ohmic metal con- tacts are easily formed on the same surface by selecting kinds of metals. 6,7 Utilizing this nature, electronic devices such as, in particular, metal-semiconductor field-effect tran- sistors MESFETshave been fabricated on hydrogen- terminated diamond surfaces. 2,5,6,8 Especially in microwave power electronics, the performance has been improving since a diamond microwave MESFET reported for the first time in 2001. 9 Recently, cut-off frequencies for the current and power gains, f T and f max have reached 45 and 120 GHz, respectively. At the same time, an output power density of 2.1 W/mm at 1 GHz has been realized. 8 In spite of its potential for applications of the surface conduction on the hydrogen-terminated diamond, the detail understanding of its origin and transport properties is not adequate and remains still controversial at present. 1012 Schottky barrier heights SBHsof metal/oxygenated- diamond contacts have been reported to be comparatively high 1–2 eVand independent of the metal work function or the metal electronegativity. 6,1318 The results suggest that the Fermi level at the interface is pinned in the band gap of diamond. This agrees with a result of x-ray photoemission spectroscopy that the Fermi level of the oxygenated surface is pinned at 1.7 eV above the valence-band maximum VBM. 19 In contrast to this, the Fermi-level pinning is re- duced at the interface of the metal/hydrogen-terminated dia- mond. In our previous work, 6,20 barrier heights of various metal contacts on the hydrogen-terminated diamond 001 were estimated from their current-voltage I-Vcharacteris- tics using high-quality point-contact diodes. A strong corre- lation between the barrier heights and metal electronegativi- ties was observed. In addition, ohmic characteristics were obtained in metals with comparably high electronegativities, such as Pt and Au. The results indicate that the Fermi level at the interface is not strongly pinned. However, the barrier heights were obtained by a rough estimation based on as- sumed contact areas, which were probably overestimated. The hydrogen-terminated surface of diamond exhibits negative electron affinity NEARefs. 2124while those of clean and oxygen-terminated surfaces are positive. This nature indicates vast potentials for electronic applications such as cold cathode emitters, etc. The electron affinity of diamond varies with its surface structure. The variation reaches up to 3 eV from the oxygen- terminated surface to the hydrogen-terminated surface. 24 The NEA of the hydrogen-terminated surface is related to its sur- face C-H dipoles. 23,24 On the other hand, the interfacial di- poles affect the barrier height of an interface. 25 Hence the electron-affinity variation should affect barrier heights. How- ever, very few arguments have appeared up to the present. In this work, the interfaces of metal/hydrogen-terminated diamond contacts are modeled including the carrier density of the surface conductive layer and the electron-affinity variation from the clean surface. Based on the model and experimentally obtained barrier heights, the carrier density and the electron affinity of the hydrogen-terminated diamond surface are discussed. In addition, the Fermi-level position of the free surface is also discussed. II. EXPERIMENT The starting materials were homoepitaxial diamond films deposited by microwave plasma-assisted CVD technique on high-pressure high-temperature synthetic Ib diamond 001 substrates 1.5 2.0 0.3 mm 3 in size. The reaction gases were CH 4 2.25%/ O 2 0.75%diluted with H 2 in a total gas flow of 100 sccm and under a total pressure of 35 Torr. The substrate temperature was raised up to 900 ° C by plasma PHYSICAL REVIEW B 81, 045303 2010 1098-0121/2010/814/04530311©2010 The American Physical Society 045303-1