Topside release of atomic force microscopy probes with molded diamond tips M. Fouchier a, * , P. Eyben a , G. Jamieson a , W. Vandervorst a,b a IMEC, Kapeldreef 75, 3001 Leuven, Belgium b KU Leuven, INSYS, Kard Mercierlaan 92, B-3001 Leuven, Belgium Available online 29 December 2004 Abstract Atomic force microscopy (AFM) probes with highly doped molded diamond tips have proven to increase the res- olution of scanning spreading resistance microscopy (SSRM) measurements. There is consequently a need for probes with consistent characteristics. AFM probes with molded tips require the attachment of a holder piece for their manip- ulation. Because of the size of this holder piece, the probes are typically released from the backside of the substrate. We propose a novel approach that combines the advantages of topside release with a release after attachment of the holder piece. In this approach, the contact area between the holder piece and the substrate is reduced to a few bonding pads. The release chemical can then flow under the holder piece in between the pads. Since only the pads need to be under- etched, the release time is greatly reduced. Ó 2005 Elsevier B.V. All rights reserved. Keywords: AFM; Probes; Holder; Release; Diamond 1. Introduction Scanning spreading resistance microscopy (SSRM) has emerged as the technique of choice for two-dimensional (2D) dopant mapping of modern microelectronics devices [1]. During an SSRM measurement, a conductive atomic force microscopy (AFM) probe is scanned across a de- vice cross-section while the resistance under the probe is measured. This resistance is then corre- lated to the carrier concentration, which is plotted to obtain a 2D map. A very high pressure (10 GPa) has to be exerted on the sample in order to obtain a good electrical contact. Only doped-dia- mond tips have proved hard enough to withstand this pressure for a significant scan length [2]. Probes with molded diamond tips have shown to increase the resolution and consistency of the mea- surements [3] when compared to conventional diamond coated silicon probes, allowing the 0167-9317/$ - see front matter Ó 2005 Elsevier B.V. All rights reserved. doi:10.1016/j.mee.2004.12.011 * Corresponding author. Tel.: +32 16 28 13 07; fax: +32 16 28 17 06. E-mail address: fouchier@imec.be (M. Fouchier). Microelectronic Engineering 78–79 (2005) 73–78 www.elsevier.com/locate/mee