UNIVERSITY OF ILLINOIS OPTICAL AND DISCHARGE PHYSICS ICOPS99_1 SIMULATIONS OF LOW FIELD HELICON DISCHARGES USING A TWO DIMENSIONAL HYBRID PLASMA EQUIPMENT MODEL* Ronald L. Kinder and Mark J. Kushner University of Illinois, Urbana-Champaign e-mail : rkinder@uigela.ece.uiuc.edu mjk@uigela.ece.uiuc.edu web site : http://uigelz.ece.uiuc.edu 26th IEEE International Conference on Plasma Science Monterey CA USA June 20 - 24, 1999 *Work Supported by SRC, AFOSR/DARPA, Applied Materials, and LAM Research