© December 2021| IJIRT | Volume 8 Issue 7 | ISSN: 2349-6002
IJIRT 153360 INTERNATIONAL JOURNAL OF INNOVATIVE RESEARCH IN TECHNOLOGY 563
TiO
2
Thin Films: A Review
Amol P Zerwal
1
, Rajendra S Khadayate
2
, Neha N Malpure
3
, Chetan K Kasar
4
, Dipak M Marathe
5
,
Shriram T Suryawanshi
6
1,2,3
G.D.M. Arts, K.R.N Commerce & M.D. Science, Jamner, Dist. Jalgaon, Maharashtra, India
4
Chatrapati Shivaji Jr Science College, Jalgaon, Maharashtra, India
5
S R N D Arts, Commerce and Science College, Bhadgaon, Dist. Jalgaon, Maharashtra, India
6
S S M M Arts, Science and Commerce College, Pachora, Dist. Jalgaon Maharashtra, India
Abstract - Oxides of materials have huge applications in
near about all developments and technologies. The
proper synthesis of oxides with different doping, it is
widely used for various purposes. In this review article,
synthesis of TiO2 by sol gel method and different
methods for deposition of thin films is explained because;
sol gel method is found convenient, suitable, simple, low-
cost method.
Review said that Titanium dioxide (TiO2) is found the
vast applicable material. It has lots of application. TiO2
itself or with doping with proper material it used as a
photo sensor, humidity sensor, ethanol sensor, organic
vapour sensor, environmental chemical species sensor,
pH sensor etc. The different properties of TiO2 are
studied and explained in this review article.
Index Terms - Synthesis, Deposition, Thin Films, Sol - gel,
spin coating, Sensing, Dopant, etc.
1.INTRODUCTION
Since ancient time, our ancestor has started the journey
of research. The latest technology in science is nothing
but the need of human being. As per the need, we
developed by using the materials on the Earth in
proper manner and proper proportion. We use all
materials in bulk quantity, but before the use we must
know the properties of smallest unit. To know the
property, structure etc of smallest form of material on
their nano scale we must know the different thin or
thick film deposition techniques. There are various
method of thin film depositions as well as synthesis of
material used by the researchers. Researchers are busy
to find the different applications of the materials. With
proper synthesis method and with proper doping of
materials, different materials have the huge
applications in sensing area. Most of the materials are
used as a photo sensor, gas sensor, humidity sensor,
chemical sensor, temperature sensor etc. [1]
Thin films can be made by using, sterilized substrate,
base material which is to be deposit, a source for the
film material, needs to stick material with substrate
and etching of film to attain the certain pattern of the
film.
Many oxides of materials found on earth are widely
used in different sensing devices. TiO2, SnO2, ZnO,
ZrO2, CeO2-ZrO2, Cr2O3, WO3, Al2O3, Y2O3 etc are
the most important oxides used as sensors. [2-5]
Out of all the oxides present on the earth, Titanium
oxide is found to be widely used material and the study
related to TiO2 is going on large scale by the
researchers. Titanium dioxide (TiO2) has been an
important material for decades, combining numerous
attractive properties in terms of economy (low price,
large availability) or ecology (non-toxic), as well as
broad physical and chemical possibilities.
It is found that, TiO2 is used as a photo sensor,
humidity sensor, ethanol sensor, organic vapor sensor,
environmental chemical species sensor, pH sensor etc.
2. APPLICATIONS OF TiO2
When pure polypyrrole (PPy) and TiO2 nanoparticles
/polypyrrole (TiO2 NPs/PPy) form composite thin
films on an alumina substrate, characterization shows
that, it can be used as humidity sensor. [6]
The sensor made of TiO2 NPs/PPy composite thin
films, using the added amount of TiO2 NPs as 0.0012
g showed the highest sensitivity, smaller hysteresis
and best linearity. Moreover, other sensing properties,
such as effects of applied frequency, ambient
temperature [7], response and recovery time and long-
term stability were also investigated [8].
A new type of solar cell (called of the third generation)
based on the use of a TiO2 layer sensitized with a dye
(dye-sensitized solar cell [DSSC]). This cell differs