10 December 2021 POLITECNICO DI TORINO Repository ISTITUZIONALE Effect of electro-thermo-mechanical coupling on the short-circuit in RF microswitch operation / BRUSA E.; MUNTEANU M.Gh.. - STAMPA. - 8066(2011), pp. 80660W-1-80660W-15. ((Intervento presentato al convegno SPIE Microtechnologies 2011 tenutosi a Prague (CZ) nel 18-20 April 2011 [10.1117/12.886595]. Original Effect of electro-thermo-mechanical coupling on the short-circuit in RF microswitch operation Publisher: Published DOI:10.1117/12.886595 Terms of use: openAccess Publisher copyright (Article begins on next page) This article is made available under terms and conditions as specified in the corresponding bibliographic description in the repository Availability: This version is available at: 11583/2428579 since: SPIE