RC25083 (W1012-023) December 7, 2010 Other IBM Research Report Collateral Damage-Free Debridement Using 193 nm ArF Laser James J. Wynne 1 , Jerome M. Felsenstein 2 , Robert Trzcinski 1 , Donna Zupanski-Nielsen 1 , Daniel P. Connors 1 1 IBM Research Division Thomas J. Watson Research Center P.O. Box 218 Yorktown Heights, NY 10598 2 100 South Highland Avenue Ossining, NY 10562 Research Division Almaden - Austin - Beijing - Cambridge - Haifa - India - T. J. Watson - Tokyo - Zurich LIMITED DISTRIBUTION NOTICE: This report has been submitted for publication outside of IBM and will probably be copyrighted if accepted for publication. It has been issued as a Research Report for early dissemination of its contents. In view of the transfer of copyright to the outside publisher, its distribution outside of IBM prior to publication should be limited to peer communications and specific requests. After outside publication, requests should be filled only by reprints or legally obtained copies of the article (e.g. , payment of royalties). Copies may be requested from IBM T. J. Watson Research Center , P. O. Box 218, Yorktown Heights, NY 10598 USA (email: reports@us.ibm.com). Some reports are available on the internet at http://domino.watson.ibm.com/library/CyberDig.nsf/home .