AIAA-2002-2702 Technology Development for Self-Powered Sensors Stephen Horowitz, Anurag Kasyap, Fei Liu, David Johnson, Toshikazu Nishida, Khai Ngo, Mark Sheplak, and Louis Cattafesta Interdisciplinary Microsystems Group University of Florida Gainesville, FL 1 st Flow Control Conference 24 - 26 June 2002 / St. Louis, MO For permission to copy or republish, contact the American Institute of Aeronautics and Astronautics, 1801 Alexander Bell Drive, Suite 500, Reston, Virginia 20191-4344.