Microscopic adsorption process of CO on Si100c 4 Ã 2 by means of low-temperature scanning tunneling microscopy Y. Yamashita,* M. Z. Hossain, K. Mukai, and J. Yoshinobu The Institute for Solid State Physics, The University of Tokyo, 5-1-5, Kashiwanoha, Kashiwa, Chiba 277-8581, Japan Received 2 December 2002; revised manuscript received 26 March 2003; published 31 July 2003 The microscopic adsorption process and bonding nature of CO on Si100have been investigated by means of low-temperature scanning tunneling microscopy and valence-band photoelectron spectroscopy, respectively. CO molecules initially adsorb at the C-defect and then start to develop as an island. Thus, the C defect is an inhomogeneous nucleation center for the CO island. Upon adsorption, 5 donation dominantly occurs from CO to the silicon down dimer atom, forming a bonding state at 10.68 eV according to the valence-band photoelectron spectra. Thus, CO preferentially interacts with the electron-deficient down dimer atom. DOI: 10.1103/PhysRevB.68.033314 PACS numbers: 68.37.Ef, 68.35.Ja The understanding of chemical reactivity of the Si100 surface is important, not only from the scientific perspective but also from technological applications, because the Si100 surface has been used for the substrate of the most frequently used semiconductor devices. The dimer of the Si100sur- face is asymmetric 1–8 where the up dimer atom is electron rich, while the down dimer atom is electron deficient. 1–3,7,8 Thus, from the perspective of surface chemistry, the reactiv- ity of up and down dimer atoms should be different towards the polar molecules. When CO, which is a typical polar and Lewis-base mol- ecule, is dosed to the Si(100) c (4 2) surface, CO chemi- sorbs molecularly on Si100below 200 K Refs. 9–13 and adsorbs on the down dimer atom. 12 Despite these stud- ies, the microscopic adsorption process and the detailed bonding nature of CO on the Si(100) c (4 2) surface are poorly understood. In the present study, we investigated the microscopic adsorption process and the detailed bonding na- ture of CO on the Si(100) c (4 2) surface using low- temperature scanning tunneling microscopy STMand valence-band photoelectron spectroscopy PES, respec- tively. The experiments were performed in ultrahigh vacuum UHVchambers, where the base pressure was below 1 10 -8 Pa. Boron-doped p-type Si100wafers were used in the experiments. Clean Si(100) c (4 2) surfaces were ob- tained after being outgassed at 900 K for 12 h, flashed up at 1550 K several times, and cooled slowly from 1000 K to 70 K. During flashing, the pressure was below 1.2 10 -8 Pa to prepare an almost defect free Si100surface ( 0.3%). 14 The CO molecules were introduced into the UHV chamber through a gas doser. The STM measurements were performed with a JSPM 4500 microscope. In the STM measurements, samples were cooled at 70 K using solid N 2 . Valence PES measurements were performed at BL 16B in KEK. The incident photon energy was 50 eV, and the pho- toelectrons were detected at a normal emission condition. The sample was cooled at 100 K and the overall instrumental resolution of this PES system was 30 meV. Figure 1 shows a series of occupied state STM images before and after a small exposure of CO molecules to the Si(100) c (4 2) surface. For the Si(100) c (4 2) clean sur- face Fig. 1a, the buckled dimers with c (4 2) phase are clearly observed. Bright zigzag lines are attributed to the up dimer atoms of the silicon asymmetric dimer. 4 Note that down dimer atoms of the silicon asymmetric dimer become bright when the unoccupied states are probed. 15,16 For the Si(100) c (4 2) clean surface Fig. 1a, few defects 0.2% are observed. Type-A , type-B , and type-C defects were re- ported on the Si100surface. 17–19 In Fig. 1a, ‘‘Y’’-shaped depressions are due to the A-defect 17,20 . The depressions in- dicated by arrows in Fig. 1aare due to the C defect because this defect becomes bright when the unoccupied states are probed. 19 For the structure of the C defect, we have recently reported that the C defect is caused by the dissociative ad- sorption of H 2 O on the same side of two adjacent dimers; there exist Si-OH and Si-H species and two reactive dangling bonds in these two dimers. 20 It should be noted that the de- fect density in this study is very low 0.2%, compared with the previous STM images on the Si100surface the defect density is usually a few percent. 4,21 At the initial stage of adsorption, CO molecules are pref- erentially adsorbed at the C defect sites Fig. 1b. Since the depression area is increased as a function of exposure, these depressions can be assigned to the effect of the adsorbed CO molecules. Therefore, CO molecules are initially adsorbed at the C defects and then start to develop as an island structure. Since the C defect has very reactive dangling bonds, 20 it is likely that CO molecules initially adsorb at the C defect site. Note that bright protrusions are observed in the images Figs. 1b–1d. However, they have not been identified yet. They may be precursor species. According to the temperature programmed desorption TPDstudy of CO on Si(100) c (4 2), two desorption peaks were observed at 210 K and 235 K, when 0.1 ML of CO was exposed to the Si(100) c (4 2) surface at 90 K, 13 where ML stands for monolayer. The intensity ratio became 1:0.07 at saturation 0.5 ML; one CO molecule per Si dimer 10 . 13 Kubo et al. concluded that the former one was attributed to CO adsorbed on the silicon dimer, whereas the latter one was due to CO located in defect sites; the defect site may be a more stable adsorption site than the defect free surface. Therefore, we conclude that the initial adsorption site of CO on the Si(100) c (4 2) surface is at the C defect. PHYSICAL REVIEW B 68, 033314 2003 0163-1829/2003/683/0333144/$20.00 ©2003 The American Physical Society 68 033314-1