396 ISSN 1606-867Х (Print) ISSN 2687-0711 (Online) Condensed Matter and Interphases Kondensirovannye Sredy i Mezhfaznye Granitsy https://journals.vsu.ru/kcmf/ Original articles Research article https://doi.org/10.17308/kcmf.2021.23/3531 TSF-MOCVD – a novel technique for chemical vapour deposition on oxide thin flms and layered heterostructures A. R. Kaul 1 , R. R. Nygaard 1 , V. Yu. Ratovskiy 1 , A. L. Vasiliev 2,3,4 * 1 Lomonosov Moscow State Univеrsity, 1 Leninskie Gory, Moscow 119991, Russian Federation 2 National Research Center “Kurchatov University”, 1 pl. Akademika Kurchatova, Moscow 123182, Russian Federation 3 Shubnikov Crystallography Institute of the Russian Academy of Sciences, 59 Leninskiy prospect, Moscow 119333, Russian Federation 4 Moscow Institute of Physics and Technology, 9 Institutskiy Pereulok, Moscow Region, Dolgoprudny, 141701, Russian Federation Abstract A new principle for supplying volatile precursors to MOCVD gas-phase chemical deposition systems is proposed, based on a two-stage evaporation of an organic solution of precursors from a soaked cotton thread, which passes sequentially through the zones of evaporation of the solvent and precursors. The technological capabilities of TSF-MOCVD (Thread-Solution Feed MOCVD) are demonstrated based on examples of obtaining thin epitaxial flms of СеО 2 , h-LuFeO3 and thin-flm heterostructures β-Fe 2 O 3 /h-LuFeO 3 . The results of studying the obtained flms by X-ray diffraction, energy dispersive X-ray analysis, and high- and low-resolution transmission microscopy are presented. Using the TSF module, one can fnely vary the crystallisation conditions, obtaining coatings of the required degree of crystallinity, as evidenced by the obtained dependences of the integral width of the h-LuFeO 3 refection on the flm growth rate. Based on the TEM and XRD data, it was concluded that β-Fe 2 O 3 grows epitaxially over the h-LuFeO 3 layer. Thus, using TSF-MOCVD, one can fexibly change the composition of layered heterostructures and obtain highly crystalline epitaxial flms with a clear interface in a continuous deposition process. Keywords: Thread-solution feed, TSF, MOCVD, Epitaxy, Thin flms, Heterostructures Acknowledgements: the work was carried out within the framework of project No 19-33-90289 supported by Russian Foundation for Basic Research. For citation: Kaul A. R., Nygaard R. R., Ratovskiy V. Yu., Vasiliev A. L. TSF-MOCVD – a novel technique for chemical vapour deposition on oxide thin flms and layered heterostructures. Kondensirovannye sredy i mezhfaznye granitsy = Condensed Matter and Interphases. 2021;23(3): 396–405. https://doi.org/10.17308/kcmf.2021.23/3531 Для цитирования: Кауль А. Р., Нигаард Р. Р., Ратовский В. Ю., Васильев А. Л. TSF-MOCVD – новый способ осаждения оксидных тонких пленок и слоистых гетероструктур из газовой фазы. Конденсированные среды и межфазные границы. 2021;23(3): 396–405. https://doi.org/10.17308/kcmf.2021.23/3531  Roy Nygaard, e-mail: rnygaard@mail.ru © Kaul A. R., Nygaard R. R., Ratovskiy V. Yu., Vasiliev A. L., 2021 The content is available under Creative Commons Attribution 4.0 License. Condensed Matter and Interphases. 2021;23(3): 396–405