84 Copyright © 2015, IGI Global. Copying or distributing in print or electronic forms without written permission of IGI Global is prohibited. Chapter 3 DOI: 10.4018/978-1-4666-7248-2.ch003 ABSTRACT Atomic Force Microscopes (AFMs) are used in many nanopositioning applications in order to measure the topography of various specimens at an atomic level through surface imaging. The imaging of the samples in AFMs is carried out by using a three degree-of-freedom positioning unit called Piezoelectric Tube Scanner (PTS). The performance of the AFM mostly depends on the performance of the PTS. However, the PTS of the AFM sufers from the problem of vibration. This chapter presents a design of a damping controller to compensate the induced vibration of the scanner. Experimental results are presented to show the efectiveness of the proposed controller. The experimental results show that the proposed controller is able to compensate 90% of the vibration of the PTS. 1. INTRODUCTION Scanning probe microscopy (SPM) (Binning et al., 1986; Meyer et al., 2004) refers to a group of imaging techniques that collect images of sample surfaces through scanning. Many types of SPM systems such as scanning tunneling microscope (STM) (Binning et al., 1987), atomic force microscope (AFM) (Bhikkaji et al., 2008; Das et al., 2012; Ratnam et al., 2005), and magnetic force microscope (MFM) (Rugar et al., 1990) are used now a day to view sample surfaces. The SPM was first found in the form of STM. The STM uses only conducting samples to scan which limits the use of STM for non-conducting samples. This leads to the invention of the AFM. The AFM is a type of SPM system which is used to measure the Advanced Vibration Control of Atomic Force Microscope Scanner Sajal K. Das University of New South Wales, Australia Hemanshu R. Pota University of New South Wales, Australia Ian R. Petersen University of New South Wales, Australia