Chapter 8 Homoepitaxy of germanium by hyperthermal ion irradiation The low energy Ar + ion beam sputtering on Ge(100) surface produces a dense array of faceted nanostructures for normal incidence hyperther- mal ion bombardment at elevated temperatures. Related publications Debasree Chowdhury, Debabrata Ghose and Safiul Alam Mollick, Homoepitaxy of germanium by hyperthermal ion irradiation. Vacuum, 107, 23 (2014). 126