coatings
Article
Providing a Specified Level of Electromagnetic Shielding with
Nickel Thin Films Formed by DC Magnetron Sputtering
Oleg A. Testov
1
, Andrey E. Komlev
2
, Kamil G. Gareev
1,3,
* , Ivan K. Khmelnitskiy
1,3
, Victor V. Luchinin
1,3
,
Eugeniy N. Sevost’yanov
1
and Igor O. Testov
1,3
Citation: Testov, O.A.; Komlev, A.E.;
Gareev, K.G.; Khmelnitskiy, I.K.;
Luchinin, V.V.; Sevost’yanov, E.N.;
Testov, I.O. Providing a Specified
Level of Electromagnetic Shielding
with Nickel Thin Films Formed by
DC Magnetron Sputtering. Coatings
2021, 11, 1455. https://doi.org/
10.3390/coatings11121455
Academic Editor: Susana Sério
Received: 4 October 2021
Accepted: 25 November 2021
Published: 26 November 2021
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4.0/).
1
Engineering Centre for Microtechnology and Diagnostics, Saint Petersburg Electrotechnical University “LETI”,
197376 Saint Petersburg, Russia; otestov@mail.ru (O.A.T.); khmelnitskiy@gmail.com (I.K.K.);
cmid_leti@mail.ru (V.V.L.); sevostyanov86@bk.ru (E.N.S.); igortestov1999@mail.ru (I.O.T.)
2
Department of Physical Electronics and Technology, Saint Petersburg Electrotechnical University “LETI”,
197376 Saint Petersburg, Russia; aekomlev@etu.ru
3
Department of Micro and Nanoelectronics, Saint Petersburg Electrotechnical University “LETI”,
197376 Saint Petersburg, Russia
* Correspondence: kggareev@etu.ru
Abstract: Nickel films of 4–250 nm thickness were produced by DC magnetron sputtering onto glass
and silicon substrates. The electrical properties of the films were investigated by the four-probe
method and the surface morphology of the films was studied by atomic force microscopy. To measure
the shielding effectiveness, a portable closed stand based on horn antennas was used. A theoretical
assessment of the shielding effectiveness of nickel films of various thickness under electromagnetic
radiation of a range of frequencies was carried out using two different approximations. The results
demonstrate the shielding effectiveness of up to 35 dB of the nickel thin films in the frequency range
of 2–18 GHz.
Keywords: nickel; electromagnetic shielding; metal thin films; vacuum deposition; DC magnetron
sputtering; electrical resistivity; atomic force microscopy; theoretical calculation
1. Introduction
The widespread use of devices generating electromagnetic radiation (EMR) requires
operative decisions focused on eliminating related technical problems. First of all, these
are the problems of electromagnetic compatibility of various electrical appliances and their
protection from an external electromagnetic influence [1]. The main source of electromag-
netic waves (EMW) are electronic devices operating in the decimeter (ultra high frequency,
0.3–3.0 GHz) and centimeter (super high frequency, 3–30 GHz) wavelength ranges. There
is a trend of increasing operating frequencies of EMW, which aims at increasing the data
transfer rate.
The traditional way of preventing the EMW pollution is the use of electromagnetic
shields based on high-conductivity metals [2,3], composite materials with conductive [4,5]
or magnetic fillers [6,7], conductive polymers [5,8] and other materials [9–11] forming a
protective shell.
The priority task at the stage of developing an electromagnetic shield is to maximize
the value of shielding effectiveness (SE). It is necessary to take into account additional
requirements for the shield operational characteristics, such as weight, dimensions and
temperature range of operation. Most of the recent solutions in the design of electro-
magnetic shields are based on high-conductivity metals with the electrical resistivity of
ρ
v
< 10.0 μΩ·cm at room temperature [12–14].
In addition to high conductivity, a metal coating must have corrosion resistance, high
adhesion and minimal internal mechanical stress. The corrosion resistance depends on
the properties of the oxide film formed on the metal surface. The protective effect of the
Coatings 2021, 11, 1455. https://doi.org/10.3390/coatings11121455 https://www.mdpi.com/journal/coatings