Energy and Buildings 43 (2011) 3258–3262
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Energy and Buildings
j our na l ho me p age: www.elsevier.com/locate/enbuild
The use of occupancy as a surrogate for particle concentrations in recirculating,
zoned cleanrooms
Luke Strauss, Jeffrey Larkin, K. Max Zhang
∗
Sibley School of Mechanical and Aerospace Engineering, Cornell University, Ithaca, NY 14853, USA
a r t i c l e i n f o
Article history:
Received 14 June 2011
Received in revised form 19 August 2011
Accepted 26 August 2011
Keywords:
OBCV
SBDCV
Cleanroom
Human particulate
a b s t r a c t
The substantial energy demands of today’s cleanroom environmental-maintenance systems provide
large opportunities for energy conservation. However, cleanroom environments are subject to much
more stringent standards and operate with much smaller tolerances, and therefore simple application
of industrial/commercial controls is not sufficient. We conducted a set of measurements in a Class 1000
cleanroom to confirm that humans are the predominant source of particles in a cleanroom, support-
ing that occupancy can be used as an effective surrogate for particle concentrations. Our data suggest
that people release approximately 1.7 × 10
4
particles per minute into the cleanroom and raise the local
concentration of particles by 1742 ± 481 particles m
-3
person
-1
. Furthermore, our timescale analysis on
control system and ventilation unit responses indicates that a predictive-occupancy system is required
for implementing demand-controlled ventilation.
© 2011 Elsevier B.V. All rights reserved.
1. Introduction
Cleanrooms represent an energy intensive built environment
to most commercial spaces [1–3]. Unlike most commercial spaces,
e.g. office buildings, the tolerable interior environmental variation
in a cleanroom exists in a narrow range defined by the cleanroom
class [4]. Cleanrooms fall generally into two categories: those that
clean the entire occupied space, and those that clean the equip-
ment space only, using various isolation procedures to separate
the dirty room from the equipment (clean cabins) [5]. The primary
difference between these two basic classes lies in the presence
of people; the former category includes occupants in the cleaned
space while the latter category excludes them. The former cate-
gory, i.e., whole-room cleanrooms, is much easier to build, and
offers greater flexibility in post-construction equipment changes,
making them attractive from an infrastructure and management
standpoint. The flexibility of a whole-room cleanroom, however,
comes at the price of a larger space in need of cleaning and a
larger set of contamination sources. This results in greater cleaning
requirements and therefore commensurately greater energy use.
Several groups have been investigating the feasibility of applying
demand-controlled ventilation and system-control techniques in
cleanrooms to decrease energy intensity while maintaining a high
quality environment within tight tolerances [6,7]. Following up
∗
Corresponding author. Tel.: +1 6072545402; fax: +1 6072551222.
E-mail address: kz33@cornell.edu (K.M. Zhang).
on the DHC study (a cleanroom in upstate New York) conducted
by Kircher and coworkers [8], we investigate the opportunities
and difficulties of implementing a sensor-based demand controlled
ventilation (SBDCV) system [9], based on an occupancy-based con-
trolled ventilation model (OBCV).
Research in SBDCV and OBCV in cleanrooms is fairly recent,
and depends strongly on the underlying assumption that the pri-
mary pollutant source are the occupants, rather than operation
of equipment or constant sources like wall and ceiling-tile shed-
ding. Unfortunately, a search of literature did not produce any
experimental evidence in support of this assumption. We did find,
however, many investigations using occupancy as a proxy for
the contaminants of concern [6,7,10,11]. While this assumption
seems logical due to the inherent properties of living creatures,
it also seems plausible to expect a certain amount of shedding
from cleanroom processes and equipment. Thus it is imperative
to verify the relative magnitudes of the aforementioned source
strengths in order to develop effective cleanroom control systems.
In a cleanroom setting with particulate loading on the order of
≤10
5
particles m
-3
, contamination sources like wall- and ceiling-
shedding, floor dust, equipment operation, etc. will introduce con-
tamination, but these sources should be fairly constant and should
appear whenever the cleanroom machines are in use, regardless
of occupancy. Sources of this type set the baseline cleaning rate in
a facility. Some may argue that the latter variable is occupancy-
related, but machine activity likely is not directly proportional
to occupancy. An OBCV cleanroom model, which depends on
occupancy-sensors alone cannot be depended upon to maintain a
cleanroom environment unless we can show that occupancy is, to
0378-7788/$ – see front matter © 2011 Elsevier B.V. All rights reserved.
doi:10.1016/j.enbuild.2011.08.027