This article has been accepted for publication and undergone full peer review but has not been through the copyediting, typesetting, pagination and proofreading process, which may lead to differences between this version and the Version of Record . Please cite this article as doi: 10.1002/pssa.201900755. This article is protected by copyright. All rights reserved The influence of AlN nucleation layer on RF transmission loss of AlN-on-Si hetero-structure Shane Chang*, Ming Zhao*, Valentina Spampinato, Alexis Franquet, Thi-Hien Do, Akira Uedono, Tien Tung Luong, Tsang-Hsuan Wang, Li Chang* Shane Chang Department of Materials Science and Engineering, National Chiao Tung University, University Rd. 1001, Hsinchu 30010, Taiwan Email : shanechang1231@hotmail.com Dr. Ming Zhao IMEC, Kapeldreef 75, Leuven B-3001, Belgium Email : Ming.Zhao@imec.be Dr. Valentina Spampinato IMEC, Kapeldreef 75, Leuven B-3001, Belgium Email : Valentina.Spampinato@imec.be Dr. Alexis Franquet IMEC, Kapeldreef 75, Leuven B-3001, Belgium Email : Alexis.Franquet@imec.be Dr. Thi-Hien Do Department of Materials Science and Engineering, National Chiao Tung University, University Rd. 1001, Hsinchu 30010, Taiwan Email : dohienvl@gmail.com Prof. Akira Uedono Division of Applied Physics, Faculty of Pure and Applied Science, University of Tsukuba, Tsukuba,Ibaraki 305-8573, Japan Email : uedono.akira.gb@u.tsukuba.ac.jp Dr. Tien Tung Luong Department of Materials Science and Engineering, National Chiao Tung University, University Rd. 1001, Hsinchu 30010, Taiwan Email : tungluongtien@gmail.com Tsang-Hsuan Wang ted Article g Materials Science a Materials Scien Taiwan wan ng1231@hotmail 231@ho ao ao ef 75, Leuven B 5, Leuven -3 ao@imec.be @imec.be a a Spampinato Spampin ef 75, Leuven B-3 a.Spampinato@im pampinato@ cept ranquet quet ef 75, Leuven B 5, Leuven -3 ranquet@imec.be anquet@imec n Do Do Materials Science a ials Scien e Ac mail.com Uedono don ied Physics, Facu Physics, F kira.gb@u.tsukub a.gb@u.tsu A ng Luong ng Luong Materials Science a s Scien