DOI: 10.21776/ub.jpacr.2018.007.03.426 J. Pure App. Chem. Res., 2018, 7(3), 266-274 10 September 2018 X The journal homepage www.jpacr.ub.ac.id p-ISSN : 2302 – 4690 | e-ISSN : 2541 – 0733 This is an open access article distributed under the terms of the Creative Commons Attribution-NonCommercial 4.0 International which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by-nc/4.0/) Study of Hydrolysis on Pb(Zr x Ti 1-x )O 3 Synthesis Using Zirconium(IV) Nitrate as Precursor and Their Densification Process Akhmad Al-bari, 1 Rachmat Triandi Tjahjanto, 1* and Masruroh, 2 . 1 Chemistry Department, Faculty of Mathematics and Natural Sciences, University of Brawijaya, Jl. Veteran 65145 Malang, Indonesia 2 Physics Department, Faculty of Mathematics and Natural Sciences, University of Brawijaya, Jl. Veteran 65145 Malang, Indonesia * Corresponding email: rachmat_t@ub.ac.id Received 21 May 2018; Revised 3 July 2018; Accepted 6 July 2018 ABSTRACT Pb(Zr x Ti 1-x )O 3 (PZT) has extensive application in electronic components as a thin layer. The densification layer is controlled by some factor such as precursor composition and heating techniques. Moreover, hydrolysis reaction and heating rate are also effecting the PZT synthesis. Zirconium(IV) nitrate stabilized by PEG-acetate was proposed as the precursor in this work. The PZT synthesis (55:45) was varied in R w ratio by comparing water mole and the total mole of metal. The PZT obtained from R w = 0, 6, 9, and 12 are coated on silicon substrates and annealed with at 650°C using various heating rates of 1, 5, 10, and 30 °C/min. The characterization and analysis of synthesized PZT were performed with FTIR and a microscope. Thermal dynamic behaviour and crystal orientation are also observed. The results show that PZT synthesis using zirconium(IV) nitrate as precursor and PEG-acetate was stable and reproducible. The effect of increasing the heating rate causes the dissipating PZT agglomeration, while the addition of water causes the cracking of crystals becomes more massive. Key word: PZT synthesis, water hydrolysis, heating rates, thin film INTRODUCTION Pb(Zr x Ti 1-x )O 3 or PZT is a ferroelectric material that has been widely used in advanced sensor micro-electric mechanical systems (MEMS) applications [1], transducers, actuators [2], dielectric in organic thin film transistor (OTFT) fabrication [3], and non-volatile memory (NVRAM) [4]. In many applications, PZT with a thin film on the substrate is preferred because it has the advantage of flexibility, space saving [5] and high energy efficiency [6]. Many factors, such as precursor composition control, coating, and sintering techniques, influences the yield of the PZT thin film on the substrate. Previously, PZT synthesis had been performed using zirconium-organic source such as Zr(OCH 2 CH 2 CH 3 ) 4 with some stabilizers substitute diethanolamine (DEA) [7], 2- methoxyethanol (MOE) [8], and ethylene glycol [9]. However, the stabilizers alternate such as polyol-acetate with zirconium(IV) nitrate, were rarely done than that of Pechini process. On the other hand, the addition of a mole of water, as a precursor control factor, can affect metallo-organic condensation reaction in sol structure to being PZT gel densification [10].