Lawrence Berkeley National Laboratory Recent Work Title Using a Straightness Reference in Obtaining More Accurate Surface Profiles from a Long Trace Profiler Permalink https://escholarship.org/uc/item/7nq2g57z Authors Irick, S.C. McKinney, W.R. Lunt, D.L.J. et al. Publication Date 1991-07-01 eScholarship.org Powered by the California Digital Library University of California