To be presented at: Opitcal Fabrication & Testing (OF&T) Monterey, CA, 24-28 June (2012) BNL 96955-2012-CP MINIMIZING ARTIFACTS IN ANALYSIS OF SURFACE TESTING* Peter Z. Takacs Brookhaven National Laboratory Upton, NY 11973 June, 2012 *This manuscript has been authored by Brookhaven Science Associates, LLC under Contract No. DE-AC02-98CH10886 with the U.S. Department of Energy. The United States Government retains, and the publisher, by accepting the article for publication, acknowledges, a world-wide license to publish or reproduce the published form of this manuscript, or allow others to do so, for the United States Government purposes.