Experimental analysis of the surface roughness evolution of etched glass for micro/nanofluidic devices This article has been downloaded from IOPscience. Please scroll down to see the full text article. 2011 J. Micromech. Microeng. 21 025012 (http://iopscience.iop.org/0960-1317/21/2/025012) Download details: IP Address: 129.186.22.184 The article was downloaded on 17/02/2012 at 22:48 Please note that terms and conditions apply. View the table of contents for this issue, or go to the journal homepage for more Home Search Collections Journals About Contact us My IOPscience