DOI 10.1007/s13233-019-7158-5 www.springer.com/13233 pISSN 1598-5032 eISSN 2092-7673
Macromolecular Research Communication
Macromol. Res., 27(8), 739-742 (2019) 739 © The Polymer Society of Korea and Springer 2019
Fabrication of Randomly Stooped Polymer Nanohairs Using Scattered
Electron Flood under Ambient Condition
Abstract: Despite attractive applications of randomly oriented nanostructures with
high aspect ratio, their fabrication suffers from both complicated processes and lack
of materials. In this letter, we present a simple but effective method for the fabrica-
tion of randomly stooped polymeric nanohairs having high aspect ratio under ambi-
ent condition by using scattered electron flood. High aspect ratio vertical nanohairs
prepared by nano-molding process exhibited randomly stooped geometry after the
electron irradiation. Fourier transform infrared spectroscopy and Monte Carlo sim-
ulation revealed that radiolysis of polymeric nanohairs by scattered electrons in
ambient air allowed directionally random distribution of shrinkage of the nano-
hairs, resulting in randomly stooped nanohair structures.
Keywords: polymer, nanohairs, electron beam, scattered electron, nanolithography, polymer shrinkage.
Nanostructured surfaces (NSSs) with high aspect ratio (AR)
inspired by nature are widely studied due to their numerous
attractive applications,
1
such as dry adhesion,
2
memory devices,
3
bactericidal activity,
4
superhydrophobicity,
5
field emitters,
6
and
antireflective surfaces,
7
etc. These unique properties facilitate
such diverse applications are attributed to their diverse geom-
etries and configuration. For instance, their shapes, including
thickness and AR, modify effective moduli depending on the
geometries. They can also enhance tackiness, the shear adhe-
sion force between substrate and nanoscale structures.
2
Of the various architectures, it has been reported that ran-
domly oriented or aperiodic nanopillars effectively suppress
the reflection by either light scattering or tuning the refractive
index, which is practically applicable to the field of camouflage
and optoelectronic devices used in the military.
8,9
So far, most
of these randomly oriented nanopillars are based on inorganic
materials such as silicon, and thus suffer from vulnerability to
high mechanical modulus and also from their brittleness. Fur-
thermore, the fabrication includes high-cost and complicated
processes such as high-density electron cyclotron resonance
plasma etching. These demerits have limited their potential appli-
cations to the preparation of high-throughput and flexible opti-
cal films and devices.
To circumvent these problems, organic materials possessing
sufficient softness, such as polymers, have been employed for
the fabrication of functional nanostructures based on the nano-
replication process. However, fabrication of stooped polymeric
nanohairs exhibited limited scope for the realization of high AR
patterns with controlled geometries because replicated struc-
tures easily collapsed or paired by capillary force and van der
Waals force.
10
Moreover, high-throughput fabrication is also lim-
ited because of the high-vacuum condition that is required for
the irradiation of electron-beam (e-beam) for stooping nanohairs.
This is the reason that, in spite of the optically functional appli-
cations, there are only a few published reports on the manufacture
of high aspect ratio polymeric nanostructures with randomly
stooped geometry.
In this letter, we report a simple yet effective method for the
preparation of randomly stooped polymeric nanohair structures,
which utilizes flood electron beam under ambient pressure. This
method features compatibility with high-throughput and large-
area fabrication because it does not require any demanding condi-
tions such as high vacuum. Severely scattered electrons trajected
into the ambient air facilitate random stooping of prepared
nanohair structures due to random volume shrinkage by radi-
olysis reactions. We also investigated the degree of stooping by
controlling irradiation time. Fourier-transform infrared (FT-IR)
spectroscopy measurements and Monte Carlo simulations of
electron trajectory were performed to analyze the radiolysis
reaction and the distributed incident angle of scattered electrons
into the nanohairs, respectively.
Figure 1 describes the fabrication process for unidirection-
ally and randomly stooped nanohairs by e-beam irradiation
after replica-molding. A silicon master mold containing hexag-
onal nanohole arrays was fabricated by reactive ion etching
(RIE) preceded by photolithography. The nanoholes have 100 nm
Woojin Jung
†,1
Gyeong G. Jeon
†,2
Jong Uk Kim
1
Tae-il Kim*
,1
Jong H. Kim*
,2
School of Chemical Engineering, Sungkyunkwan University (SKKU), Suwon 16419, Korea
2
Department of Molecular Science and Technology, Ajou University, Suwon 16499, Korea
Received February 11, 2019 / Revised April 18, 2019 / Accepted April 27, 2019
Acknowledgments: This research was supported by the National Research
Foundation of Korea (NRF) grant funded by the Korean government (MSIP:
Ministry of Science, ICT and Future Planning) (NRF-2016M2B2A4912549).
This research was also supported by the Basic Science Research Program
(NRF-2017R1D1A1B03033089) through the NRF funded by the MSIP.
*Corresponding Authors: Tae-il Kim (taeilkim@skku.edu),
Jong H. Kim (jonghkim@ajou.ac.kr)
Woojin Jung and Gyeong G. Jeon equally contributed to this work.