PROCEEDINGS OF SPIE SPIEDigitalLibrary.org/conference-proceedings-of-spie Inline metrology of high aspect ratio hole tilt using small-angle x-ray scattering Peter Gin, Matthew Wormington, Alexander Brady, Kevin Matney, Jin Zhang, et al. Peter Gin, Matthew Wormington, Alexander Brady, Kevin Matney, Jin Zhang, Osman Sorkhabi, "Inline metrology of high aspect ratio hole tilt using small- angle x-ray scattering," Proc. SPIE 12053, Metrology, Inspection, and Process Control XXXVI, 1205312 (26 May 2022); doi: 10.1117/12.2614312 Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 19 Oct 2022 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use