Quantitative model of electron energy loss in XPS A. Cohen Simonsen Department of Physics, University of Odense, DK-5230 Odense M, Denmark F. Yubero Instituto de Ciencia de Materiales de Sevilla, University of Sevilla, 41092 Sevilla, Spain S. Tougaard Department of Physics, University of Odense, DK-5230 Odense M, Denmark Received 16 December 1996 A model for the inelastic-scattering cross section of electrons in XPS experiments is presented. The calcu- lation is analogous to a previous model for reflection-electron energy-loss spectroscopy by Yubero et al. Phys. Rev. B 53, 9719 1996. The model treats the general case of photoelectron creation at arbitrary depth and with arbitrary exit angle and electron energy. The effect of the core hole as well as surface effects are included in the model. We study systematically the behavior of the model when the energy, exit angle, and depth of origin are varied. Furthermore, the effect of the core hole on the energy loss is investigated in detail. The results are compared with experimental XPS spectra from aluminum metal. S0163-18299701127-2 I. INTRODUCTION Surface electron spectroscopies such as XPS x-ray pho- toelectron spectroscopy, AES Auger electron spectros- copy, and REELS reflection-electron energy-loss spectros- copyare highly influenced by inelastic-scattering events experienced by electrons. Thus, for the purpose of quantifi- cation a thorough understanding of the energy loss is impor- tant. The usual quantity employed to describe the energy loss is the inelastic cross section, which gives the probability den- sity per unit path length of losing the energy . It can be expressed in terms of the complex dielectric function ( k, ) of the particular medium, and for electrons traveling in an infinite medium it is given by 1,2 K E 0 , = 1 E 0 a 0 k - k + dk k Im 1 k , , 1 where the following quantities are introduced: E 0 is the ini- tial energy of the electron, a 0 is the Bohr radius, and k is the wave vector transferred from the electron. k =(2 m / 2 ) 1/2 E 0 1/2 ( E 0 -) 1/2 are the limits on the k vector imposed by energy and momentum conservation dur- ing the inelastic scattering. This model, however, does not reproduce the surface loss features observed in REELS and XPS. Attempts have been made to model the inelastic cross section as a linear combination of Im1/and Im1/(1 +)]. 3 Although a reasonable fit to experiment can be made, the values of the fitting parameters seem unphysical and in- consistent. A more realistic model for REELS has been developed to describe the electron energy loss for normal incidence and exit geometry. 4 It treats the total transport process for an electron elastically backscattered a certain depth below the surface. The model was recently extended to include general incidence and exit angles 5 and was compared to experimen- tal inelastic cross sections 6 deconvoluted from experimental REELS spectra. The quantitative agreement regarding the dependence on incidence and exit angle as well as on initial energy was good and all the main loss features of the experi- ment were reproduced. The purpose of the present paper is to take a similar ap- proach to the case of XPS. The system was previously stud- ied by Gervasoni and Arista 7 who determined the energy- loss rate, but not the energy-loss distribution, i.e., the cross section. Seymour et al. 8 modeled the plasmon loss intensity in photoemission on the basis of a hydrodynamical equation. However, the model produced spurious structures in the losses that was not reproduced experimentally. Recently Chen and Chen proposed a model that incorporates both sur- face and bulk losses into the Landau formula for the energy distribution. 9 This procedure however, has three main weak- nesses: First, they integrate the surface loss function over all depths; i.e., they assume that the contribution from surface losses is the same for an electron excited at the surface and one excited deep in the bulk. Second, they incorporate this path-integrated surface loss function directly into the Landau formula. This implies that they allow for multiple surface losses to infinite order. Third, they ignore the effect of the core hole on the energy loss of the photoelectron. The first two procedures are not properly justified and the last ap- proximation is shown in the present work not to hold. We treat the general case of photoelectron creation at ar- bitrary depth and with arbitrary exit angle of the electron. The procedure is based on the ‘‘specular reflection model,’’ 7,10 which allows one to solve the electrodynamic problem with the proper boundary conditions. The result is expressed in terms of the effective inelastic cross section giving the energy-loss distribution for the total photoemis- sion process. II. THEORY We consider the following situation as a model of the experimental XPS process, Fig. 1a: a semi-infinite medium PHYSICAL REVIEW B 15 JULY 1997-I VOLUME 56, NUMBER 3 56 0163-1829/97/563/16128/$10.00 1612 © 1997 The American Physical Society