Nonlinear Dyn
https://doi.org/10.1007/s11071-019-05074-7
ORIGINAL PAPER
Nonlinear multi-element interactions in an elastically
coupled microcantilever array subject to electrodynamic
excitation
P. N. Kambali · F. Torres · N. Barniol · O. Gottlieb
Received: 13 December 2018 / Accepted: 14 June 2019
© Springer Nature B.V. 2019
Abstract In this work, we formulate and investigate
a nonlinear initial boundary-value problem for an array
of N elastically coupled hybrid microcantilever beams
that are subject to electrodynamic excitation. The equa-
tions of motion for the individual viscoelastic element
consist of two fields: the base component which is
common to all cantilevers and the unrestrained com-
ponent which is excited electrodynamically. The cou-
pling of the elements is obtained via an equivalent lin-
ear stiffness that is estimated from experimental mea-
surements of a 5-element array. We employ a Galerkin
ansatz to obtain a modal dynamical system that con-
sistently incorporates a quintic nonlinearity due to the
combined effects of cubic viscoelasticity and quadratic
electrodynamics. We validate the periodic response of
a 5-element array with moderate damping and con-
struct numerically a comprehensive bifurcation struc-
ture for a 25-element array. The analysis reveals an
intricate structure for small damping that includes both
quasiperiodic and nonstationary chaotic-like energy
transfer between the elements of the array. It is note-
worthy that an array with a larger coupling stiffness,
corresponding to a smaller distance between adjacent
P. N. Kambali · O. Gottlieb (B )
Department of Mechanical Engineering, Technion - Israel
Institute of Technology, Haifa, Israel
e-mail: oded@technion.ac.il
F. Torres · N. Barniol
Department of Electrical Engineering, Autonomous University
of Barcelona, Bellaterra, Spain
elements, yields a chaotic bifurcation structure for a
larger value of viscoelastic damping.
Keywords Microcantilever array · Common base
elastic coupling · Electrodynamic excitation ·
Nonlinear bifurcation structure · Quasiperiodic energy
transfer · Nonstationary dynamics
1 Introduction
The study of nonlinear dynamics of micro- and nano-
electromechanical system (MEMS/NEMS)-based
arrays has gained increased interest in recent years
for their potential applications such as multi-functional
mass sensors [1, 7, 34, 36, 38], biosensors [2], multian-
alyte detection and identification [4], multi-element
atomic force microscopy (AFM) [8, 17, 19, 25, 26].
There are many experimental and theoretical stud-
ies showing advantages of arrays over a single ele-
ment. Buks and Roukes [3] employed an optical diffrac-
tion method to study the collective modes and the
response of an array consisting 67 clamped paramet-
rically excited microbeams. Baguet et al. [1] studied
two- and three-beam arrays using asymptotic methods
to increase the mass sensing capability. In Ref. [6], a
large array of elastically coupled microcantilevers of
variable length was studied experimentally and numer-
ically which facilitated the separation of the resonant
peaks corresponding to individual beams when oper-
ating in vacuum at third harmonic. Endo et al. [7]
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