Accepted Manuscript Title: Compensation of nonlinear hardening effect in a nanoelectromechanical torsional resonator Authors: L. Laurent, JJ. Yon, JS. Moulet, P. Imperinetti, L. Duraffourg PII: S0924-4247(17)30238-8 DOI: http://dx.doi.org/doi:10.1016/j.sna.2017.06.027 Reference: SNA 10186 To appear in: Sensors and Actuators A Received date: 8-2-2017 Revised date: 22-6-2017 Accepted date: 26-6-2017 Please cite this article as: L.Laurent, JJ.Yon, JS.Moulet, P.Imperinetti, L.Duraffourg, Compensation of nonlinear hardening effect in a nanoelectromechanical torsional resonator, Sensors and Actuators: A Physicalhttp://dx.doi.org/10.1016/j.sna.2017.06.027 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.