VOLUME 76, NUMBER 26 PHYSICAL REVIEW LETTERS 24 JUNE 1996
Theoretical and Experimental Optical Spectroscopy Study of Hydrogen Adsorption
at Si(111)-(7 3 7)
C. Noguez,
1
C. Beitia,
2
W. Preyss,
2
A. I. Shkrebtii,
3
M. Roy,
2
Y. Borensztein,
2,
* and R. Del Sole
3, †
1
Instituto de Fisı ´ca, Universidad Nacional Autónoma de México, Apdo. Postal 20-364, 01000 México D.F., México
and Department of Physics and Astronomy, and CMSS Program, Ohio University, Athens, Ohio 45701-2979
2
Laboratoire d’Optique des Solides, UA CNRS 781, Université Pierre et Marie Curie, Case 80, 4 place Jussieu,
75252 Paris Cedex 05, France
3
Instituto Nazionale di Fisica della Materia, Departimento di Fisica, II Universitá di Roma “Tor Vergata,”
Via della Ricerca Scientifica 1, 00133 Rome, Italy
(Received 2 November 1995; revised manuscript received 14 March 1996)
The combination of in situ real-time surface differential reflectivity (SDR) spectroscopy and
microscopic calculations has been used for the first time to investigate gas adsorption on a Si surface.
The optical signatures of some microscopic structural units of Si(111)-(7 3 7) have been identified.
The development of the corresponding features in the SDR spectra upon the amount of H exposure
allowed us to demonstrate the occurrence of two different mechanisms in the hydrogenation and to
determine their relative kinetics. [S0031-9007(96)00523-6]
PACS numbers: 68.35.Bs, 68.45.Da, 73.20.At, 78.66.Db
In recent years, optical spectroscopies such as re-
flectance anisotropy spectroscopy (RAS) and surface dif-
ferential reflectivity (SDR) have proved their ability to
investigate the intrinsic electronic properties of solid sur-
faces [1,2] and to monitor the interaction of surfaces with
gas [1,3] or the growth of thin films [4]. However, most
of the experimental studies are limited to a phenomeno-
logical analysis, without a deep microscopic understand-
ing of the optical response of the surfaces. Although the
optical measurements are macroscopic in nature, they are
directly linked to the microscopic structure of the surface
and to its electronic structure [5,6]. A theoretical treat-
ment of the optical response of a solid surface, based on
its microscopic structure, is therefore necessary to fully
understand the experimental data and to interpret them
in terms of surface reconstruction, adsorption of atoms,
growth of thin films, etc.
The interaction of hydrogen with the Si111-7 3 7
surface, well described by the dimer-adatom-stacking
fault (DAS) model [7], is a complex process of broad
interest. Up to now, theoretical studies on the hydro-
genation of Si111-7 3 7 had been hampered by its
very large unit cell and only a few attempts have been
made [8,9]. On the other hand, the hydrogenation of this
surface has been investigated by numerous experimental
techniques, which have shown the existence of two reac-
tion paths [10–13].
We present the first combination of theoretical and real-
time experimental optical studies of Si111-7 3 7 and
of the H adsorption. Our experimental SDR spectra are
described by means of a theoretical microscopic model,
in terms of electronic transitions involving the bulk and
surface states of Si111-7 3 7. This permits us to
understand the intrinsic optical response of Si111-7 3
7, and to gain deep information on the hydrogenation
process. We clearly distinguish the two main mechanisms
and we follow their kinetics: (1) adsorption of H on the
dangling bonds (DBs), and (2) H breaking of the Si-Si
backbonds (BBs) of the adatoms (ADs).
The SDR experiments were performed with a
rapid in situ spectrometer [14], which delivers
the change of the reflectivity upon H adsorption:
DRR R
clean Si
-R
HSi
R
clean Si
, where R
clean Si
and
R
HSi
are the reflectivities of the clean and H-covered Si
surfaces. This quantity is related to the optical suscep-
tibility of the surface and hence provides information on
the changes of its electronic structure [5]. The incidence
angle u of the p-polarized light beam was 60
±
. The SDR
signal was registered during the H adsorption, providing a
real-time monitoring of the process. The Si samples were
heated during 5 min at 900
±
C in the vacuum chamber
(base pressure of 10
210
torr) for removing the oxide
layer, then cooled down slowly (1 K/s) to get a sharp
7 3 7 low-energy-electron-diffraction (LEED) pattern.
Atomic H was produced by decomposition of H
2
by
a tungsten filament at 1800
±
C previously outgassed at
higher temperature.
Figure 1 shows typical experimental SDR spectra (point
curves) taken from 500 spectra registered during the H
exposure, given in H
2
exposure (note that the vertical
scales differ from one spectrum to another). The sample
was maintained at 220
±
C. Similar spectra were obtained
at other temperatures between 2140 and 300
±
C. Spectrum
(a) 20 L 1 L langmuir 10
26
torr s is dominated by
a peak A at 1.8 eV, with a small negative minimum C at
3.2 eV. A second peak B is developing around 2.8 eV
in spectrum (b) (90 L), together with a double structure
D at 3.7–4.1 eV. While peak A saturates after about
150 L, structures B and D continue growing and become
progressively dominant, as shown in spectrum (e), where
peak A now reduces to a shoulder. The edge of another
structure E appears above 5 eV in spectra (d) and (e). Our
0031-9007 96 76(26) 4923(4)$10.00 © 1996 The American Physical Society 4923