Accepted Manuscript Damage-Induced Voltage Alteration Contrast in SEM images of ion-irradiated semiconductors Iwona J ´ o´ zwik , Adam Barcz , El˙ zbieta Dabrowska , Ewa Dumiszewska , Pawel Michalowski PII: S0304-3991(18)30359-0 DOI: https://doi.org/10.1016/j.ultramic.2019.04.013 Reference: ULTRAM 12785 To appear in: Ultramicroscopy Received date: 24 October 2018 Revised date: 8 April 2019 Accepted date: 30 April 2019 Please cite this article as: Iwona J ´ o´ zwik , Adam Barcz , El˙ zbieta Dabrowska , Ewa Dumiszewska , Pawel Michalowski , Damage-Induced Voltage Alteration Contrast in SEM images of ion-irradiated semiconductors, Ultramicroscopy (2019), doi: https://doi.org/10.1016/j.ultramic.2019.04.013 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.