University of Central Florida University of Central Florida STARS STARS UCF Patents Technology Transfer 12-6-2005 Laser-produced plasma EUV light source with prepulse Laser-produced plasma EUV light source with prepulse enhancement enhancement Steven Fornaca Northrop Grumman Corporation Jeffrey Hartlove Northrop Grumman Corporation Armando Martos Northrop Grumman Corporation Mark Michaelian Northrop Grumman Corporation Henry Shields Northrop Grumman Corporation See next page for additional authors Find similar works at: https://stars.library.ucf.edu/patents University of Central Florida Libraries http://library.ucf.edu This Patent is brought to you for free and open access by the Technology Transfer at STARS. It has been accepted for inclusion in UCF Patents by an authorized administrator of STARS. For more information, please contact STARS@ucf.edu. Recommended Citation Recommended Citation Fornaca, Steven; Hartlove, Jeffrey; Martos, Armando; Michaelian, Mark; Shields, Henry; and Talmadge, Samuel, "Laser-produced plasma EUV light source with prepulse enhancement" (2005). UCF Patents. 293. https://stars.library.ucf.edu/patents/293