Available online at www.sciencedirect.com Sensors and Actuators B 130 (2008) 917–942 Review MEMS-based micropumps in drug delivery and biomedical applications A. Nisar ∗ , Nitin Afzulpurkar, Banchong Mahaisavariya, Adisorn Tuantranont Industrial Systems Engineering, School of Engineering and Technology (SET), Asian Institute of Technology (AIT), P.O. Box 4, Klong Luang, Pathumthani 12120, Thailand Received 21 July 2007; accepted 31 October 2007 Available online 20 December 2007 Abstract This paper briefly overviews progress on the development of MEMS-based micropumps and their applications in drug delivery and other biomedical applications such as micrototal analysis systems (TAS) or lab-on-a-chip and point of care testing systems (POCT). The focus of the review is to present key features of micropumps such as actuation methods, working principles, construction, fabrication methods, performance parameters and their medical applications. Micropumps have been categorized as mechanical or non-mechanical based on the method by which actuation energy is obtained to drive fluid flow. The survey attempts to provide a comprehensive reference for researchers working on design and development of MEMS-based micropumps and a source for those outside the field who wish to select the best available micropump for a specific drug delivery or biomedical application. Micropumps for transdermal insulin delivery, artificial sphincter prosthesis, antithrombogenic micropumps for blood transportation, micropump for injection of glucose for diabetes patients and administration of neurotransmitters to neurons and micropumps for chemical and biological sensing have been reported. Various performance parameters such as flow rate, pressure generated and size of the micropump have been compared to facilitate selection of appropriate micropump for a particular application. Electrowetting, electrochemical and ion conductive polymer film (ICPF) actuator micropumps appear to be the most promising ones which provide adequate flow rates at very low applied voltage. Electroosmotic micropumps consume high voltages but exhibit high pressures and are intended for applications where compactness in terms of small size is required along with high-pressure generation. Bimetallic and electrostatic micropumps are smaller in size but exhibit high self-pumping frequency and further research on their design could improve their performance. Micropumps based on piezoelectric actuation require relatively high-applied voltage but exhibit high flow rates and have grown to be the dominant type of micropumps in drug delivery systems and other biomedical applications. Although a lot of progress has been made in micropump research and performance of micropumps has been continuously increasing, there is still a need to incorporate various categories of micropumps in practical drug delivery and biomedical devices and this will continue to provide a substantial stimulus for micropump research and development in future. © 2007 Elsevier B.V. All rights reserved. Keywords: MEMS; Microfluidics; Micropump; Drug delivery; Micrototal analysis systems (TAS); Point of care testing (POCT); Insulin delivery; Artificial sphincter prosthesis; Antithrombogenic micropump; Ion conductive polymer film (ICPF); Electrochemical; Evaporation type micropump Contents 1. Introduction ............................................................................................................ 918 2. Micropumps classification ............................................................................................... 920 3. Basic micropump output parameters ...................................................................................... 921 4. Mechanical micropumps ................................................................................................. 921 4.1. Electrostatic ...................................................................................................... 921 4.2. Piezoelectric ..................................................................................................... 924 4.3. Thermopneumatic ................................................................................................. 925 4.4. Shape memory alloy .............................................................................................. 927 4.5. Bimetallic ........................................................................................................ 927 ∗ Corresponding author. E-mail address: st104180@ait.ac.th (A. Nisar). 0925-4005/$ – see front matter © 2007 Elsevier B.V. All rights reserved. doi:10.1016/j.snb.2007.10.064