Subscriber access provided by BRIGHAM YOUNG UNIV Langmuir is published by the American Chemical Society. 1155 Sixteenth Street N.W., Washington, DC 20036 Letter Subsurface Oxidation for Micropatterning Silicon (SOMS) Feng Zhang, Ken Sautter, Robert C. Davis, and Matthew R. Linford Langmuir, 2009, 25 (3), 1289-1291 • DOI: 10.1021/la803408x • Publication Date (Web): 09 January 2009 Downloaded from http://pubs.acs.org on January 31, 2009 More About This Article Additional resources and features associated with this article are available within the HTML version: • Supporting Information • Access to high resolution figures • Links to articles and content related to this article • Copyright permission to reproduce figures and/or text from this article