한소진동학회논문집 제 20  제 12 호, pp. 1161~1167, 2010. DOI : 10.5050/KSNVE.2010.20.12.1161 한국소음진동공학회논문집/제 20  제 12 호, 2010년/1161 통합제진마운트용 MR 댐퍼의 실험적 성능 평가 Experimental Performance Evaluation of MR Damper for Integrated Isolation Mount 성 민 상* ․ 최 승 복† ․ 김 철 호** ․ 이 홍 기*** ․ 백 재 호*** ․ 한 현 희*** ․ 우 제 관**** Min-Sang Seong, Seung-Bok Choi, Cheol-Ho Kim, Hong Ki Lee, Jae Ho Baek, Hyun Hee Han and Je Kwan Woo (2010년 9 9 접수 ; 2010년 10 8 심사완료) Key Words : MR Damper(MR 댐퍼), Integrated Isolation Mount(통합제진마트), Vibration Control(진동 제어), Smart Material(지능재료) ABSTRACT This paper presents experimental performance evaluation of a magnetorheological(MR) damper for integrated isolation mount for ultra-precision manufacturing system. The vibration sources of the ul- tra-precision manufacturing system can be classified as follows: the one is the environmental vi- bration from the floor and the other is the transient vibration occurred from stage moving. The tran- sient vibration occurred from the stage moving has serious adverse effect to the process because the vibration scale is quite larger than other vibrations. Therefore in this research, a semi-active MR damper, which can control the transient vibration, is adopted. Also the stage needs to be isolated from tiny vibrations from the floor. For this purpose, a dry-frictionless MR damper is required. In order to achieve this goal, a novel type of MR damper is originally designed and manufactured in this work. Subsequently, the damping force characteristics of MR damper are evaluated by simulation and experiment. In addition, the vibration control performance of the MR damper associated with the stage mass is evaluated. * 기 호 설 명 A p : 피스톤 헤드 면적 † 신저 ; 정회, 하대학 기학부 E-mail : seungbok@inha.ac.kr Tel : (032)860-7319, Fax : (032)868-1716 * 정회 , 하대학 대학 기학 ** 정회 , 한생산기술연 *** 정회 , RMS Technology ****한폴리텍 II대학 메트로닉스 #  논문 부는 2010년 추 소진동 학술대회에서 발표되었 . A r : 피스톤 축 면적 Asys : 시스템 행렬 B : 속 밀도 Bsys : 력 행렬 b : 실린더 주 C e : MR 댐퍼 댐핑 수 C sky : 스훅 제어 게 c : 속 수 F d : 총 댐핑력 F dist : 외력 F MR : MR 댐퍼 항복 댐핑력 h : 간극