Journal of Power Sources 451 (2020) 227740 Available online 20 January 2020 0378-7753/© 2020 Elsevier B.V. All rights reserved. Atomic layer deposition synthesized ZnO nanomembranes: A facile route towards stable supercapacitor electrode for high capacitance Farah Naeem a, b , Sumayyah Naeem a, b , Zhe Zhao b , Gang-qiang Shu c , Jing Zhang d, * , Yongfeng Mei b , G.S. Huang b, ** a State Key Laboratory for Modifcation of Chemical Fibers and Polymer Material Science and Engineering, Donghua University, Shanghai, 201620, PR China b Department of Materials Science, Fudan University, 220 Handan Road, Shanghai, 200433, PR China c State Key Lab of ASIC and System, Fudan University, 220 Handan Road, Shanghai, 200433, PR China d College of Science, Donghua University, Shanghai, 201620, PR China HIGHLIGHTS G R A P H I C A L ABSTRACT � ZnO NMs of various thicknesses were successfully synthesized by ALD. � ZnO NMs electrodes with large capaci- tance in different electrolytes were obtained. � The excellent performances were ascribed to effective ion adsorption/ desorption. A R T I C L E INFO Keywords: Atomic layer deposition ZnO Nanomembrane Electrochemical property Supercapacitor ABSTRACT ZnO nanomembranes (NMs) are successfully fabricated by atomic layer deposition for electrochemical super- capacitor applications. The structure and morphology of ZnO NMs are investigated by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, and Raman spectroscopy. In order to prove their po- tential applications in supercapacitors, the electrochemical performance of ZnO NMs is characterized in the aqueous electrolytes (i.e., KOH, KCl, and Na 2 SO 4 ). Experimental results indicate that 6 M KOH electrolyte is the most promising one, and the largest capacitance of 846 F g 1 is achieved in this electrolyte with remarkable stability. In addition, ZnO NM with 100 ALD cycles demonstrates advanced performance in all three aqueous electrolytes, mainly due to the effective ion adsorption/desorption or extraction/insertion in the electrode. The 180-min fashing of a red LED powered by ZnO NMs supercapacitors suggests great potentials of NMs electrodes in practical applications. * Corresponding author. ** Corresponding author. E-mail addresses: jingzh@dhu.edu.cn (J. Zhang), gshuang@fudan.edu.cn (G.S. Huang). Contents lists available at ScienceDirect Journal of Power Sources journal homepage: www.elsevier.com/locate/jpowsour https://doi.org/10.1016/j.jpowsour.2020.227740 Received 2 August 2019; Received in revised form 7 January 2020; Accepted 10 January 2020