This content has been downloaded from IOPscience. Please scroll down to see the full text. Download details: IP Address: 147.96.14.15 This content was downloaded on 14/02/2014 at 18:14 Please note that terms and conditions apply. The influence of film properties on the electrical characteristics of metal - insulator - semiconductor devices View the table of contents for this issue, or go to the journal homepage for more 1997 Semicond. Sci. Technol. 12 1650 (http://iopscience.iop.org/0268-1242/12/12/018) Home Search Collections Journals About Contact us My IOPscience