Journal Pre-proof
Effects of substrate temperature and reactive gas flow rate on the crystalline ceramic
phases formation and tribological properties of W–Ti–Co–C–N thin films produced by
co-sputtering
S.A. Ataie, M. Soltanieh, R. Naghizadeh, M. Ahmadi, M. Ghanaatshoar
PII: S0272-8842(20)32465-2
DOI: https://doi.org/10.1016/j.ceramint.2020.08.087
Reference: CERI 26189
To appear in: Ceramics International
Received Date: 6 June 2020
Revised Date: 10 August 2020
Accepted Date: 11 August 2020
Please cite this article as: S.A. Ataie, M. Soltanieh, R. Naghizadeh, M. Ahmadi, M. Ghanaatshoar,
Effects of substrate temperature and reactive gas flow rate on the crystalline ceramic phases formation
and tribological properties of W–Ti–Co–C–N thin films produced by co-sputtering, Ceramics International
(2020), doi: https://doi.org/10.1016/j.ceramint.2020.08.087.
This is a PDF file of an article that has undergone enhancements after acceptance, such as the addition
of a cover page and metadata, and formatting for readability, but it is not yet the definitive version of
record. This version will undergo additional copyediting, typesetting and review before it is published
in its final form, but we are providing this version to give early visibility of the article. Please note that,
during the production process, errors may be discovered which could affect the content, and all legal
disclaimers that apply to the journal pertain.
© 2020 Published by Elsevier Ltd.