Journal Pre-proof Effects of substrate temperature and reactive gas flow rate on the crystalline ceramic phases formation and tribological properties of W–Ti–Co–C–N thin films produced by co-sputtering S.A. Ataie, M. Soltanieh, R. Naghizadeh, M. Ahmadi, M. Ghanaatshoar PII: S0272-8842(20)32465-2 DOI: https://doi.org/10.1016/j.ceramint.2020.08.087 Reference: CERI 26189 To appear in: Ceramics International Received Date: 6 June 2020 Revised Date: 10 August 2020 Accepted Date: 11 August 2020 Please cite this article as: S.A. Ataie, M. Soltanieh, R. Naghizadeh, M. Ahmadi, M. Ghanaatshoar, Effects of substrate temperature and reactive gas flow rate on the crystalline ceramic phases formation and tribological properties of W–Ti–Co–C–N thin films produced by co-sputtering, Ceramics International (2020), doi: https://doi.org/10.1016/j.ceramint.2020.08.087. This is a PDF file of an article that has undergone enhancements after acceptance, such as the addition of a cover page and metadata, and formatting for readability, but it is not yet the definitive version of record. This version will undergo additional copyediting, typesetting and review before it is published in its final form, but we are providing this version to give early visibility of the article. Please note that, during the production process, errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. © 2020 Published by Elsevier Ltd.