Accepted Manuscript Coupled Effects of Deposition and Annealing Temperatures on Optical, Electrical and Mechanical Properties of Titanium Oxide Thin Films Mark J. Miller, Junlan Wang PII: S0042-207X(15)30009-9 DOI: 10.1016/j.vacuum.2015.07.005 Reference: VAC 6741 To appear in: Vacuum Received Date: 26 June 2015 Revised Date: 8 July 2015 Accepted Date: 9 July 2015 Please cite this article as: Miller MJ, Wang J, Coupled Effects of Deposition and Annealing Temperatures on Optical, Electrical and Mechanical Properties of Titanium Oxide Thin Films, Vaccum (2015), doi: 10.1016/j.vacuum.2015.07.005. This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.